晶圆提篮升降机构+晶圆传送机构MF

（ID:1706619）

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设备部件 / 传动部件 / 晶圆提篮升降机构+晶圆传送机构MF

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#	文件名称	文件大小
1	2.PNG	45.90K
2	3.PNG	37.53K
3	4.PNG	47.64K
4	606.prt.1	91.48K
5	625.prt.1	69.57K
6	628-8.prt.1	127.26K
7	ahtfw30-s3m100-6.asm.1	42.55K
8	asm0005.asm.1	40.93K
9	asm0006.asm.1	42.19K
10	asm0011.asm.1	43.47K
11	asm0011.asm.2	43.12K
12	asm0012.asm.1	36.88K
13	asm0013.asm.1	66.33K
14	b-asmb-27.asm.1	48.84K
15	b-asmb-27.asm.2	49.02K
16	b085-a.prt.1	292.55K
17	b086-a.prt.1	288.59K
18	bf-asmb-01.asm.1	90.18K
19	bf-asmb-01.asm.2	96.66K
20	bf-asmb-01.asm.3	96.78K
21	bf-asmb-01.asm.4	96.82K
22	bf-asmb-01_asm.stp	14.21M
23	bf-asmb-01__out.log.1	6.09K
24	bf-asmb-02.asm.1	68.84K
25	bf-asmb-02.asm.2	68.45K
26	bf-asmb-03.asm.1	65.64K
27	bf-asmb-03.asm.2	65.83K
28	bf-asmb-04.asm.1	57.49K
29	bf-asmb-04.asm.2	57.67K
30	bf-asmb-05.asm.1	2.35M
31	bf-asmb-05.asm.2	1.90M
32	bf-asmb-06.asm.1	412.08K
33	bf-asmb-06.asm.2	335.50K
34	bf-asmb-07.asm.1	56.10K
35	bf-asmb-07.asm.2	56.30K
36	bf-asmb-08.asm.1	53.94K
37	bf-asmb-08.asm.2	54.13K
38	bf-asmb-09.asm.1	61.53K
39	bf-asmb-09.asm.2	60.80K
40	bf-asmb-10.asm.1	62.33K
41	bf-asmb-10.asm.2	62.53K
42	bf-asmb-12.asm.1	64.20K
43	bf-asmb-12.asm.2	63.79K
44	bf-asmb-13.asm.1	55.71K
45	bf-asmb-13.asm.2	55.29K
46	bf-asmb-14.asm.1	55.52K
47	bf-asmb-14.asm.2	55.60K
48	bf-asmb-15.asm.1	48.85K
49	bf-asmb-15.asm.2	49.03K
50	bf-asmb-16.asm.1	1.22M
51	bf-asmb-16.asm.2	1005.96K
52	bf-asmb-17.asm.1	66.80K
53	bf-asmb-17.asm.2	66.82K
54	bf-asmb-18.asm.1	66.09K
55	bf-asmb-18.asm.2	66.09K
56	bf-asmb-19.asm.1	50.53K
57	bf-asmb-19.asm.2	50.70K
58	bf-asmb-20.asm.1	82.65K
59	bf-asmb-20.asm.2	83.41K
60	bf-asmb-21.asm.1	54.40K
61	bf-asmb-21.asm.2	54.60K
62	bf-asmb-22.asm.1	334.64K
63	bf-asmb-22.asm.2	269.46K
64	bf-b-006a.prt.1	300.57K
65	bf-b-006a.prt.2	284.57K
66	bf-b-016a.prt.1	181.16K
67	bf-b-016a.prt.2	175.07K
68	bfb-001a.prt.1	753.64K
69	bfb-001a.prt.2	761.21K
70	bfb-002a.prt.1	108.05K
71	bfb-003a.prt.1	158.52K
72	bfb-003a.prt.2	149.87K
73	bfb-004a.prt.1	208.02K
74	bfb-004a.prt.2	200.56K
75	bfb-005a.prt.1	88.43K
76	bfb-007a.prt.1	190.94K
77	bfb-007a.prt.2	181.88K
78	bfb-008a.prt.1	113.15K
79	bfb-008a.prt.2	109.68K
80	bfb-009a.prt.1	172.42K
81	bfb-009a.prt.2	165.13K
82	bfb-010a.prt.1	126.92K
83	bfb-010a.prt.2	123.93K
84	bfb-011a.prt.1	92.72K
85	bfb-011a.prt.2	89.35K
86	bfb-012a.prt.1	215.08K
87	bfb-012a.prt.2	207.43K
88	bfb-013a.prt.1	136.44K
89	bfb-013a.prt.2	133.90K
90	bfb-014a.prt.1	131.06K
91	bfb-014a.prt.2	127.35K
92	bfb-015a.prt.1	91.24K
93	bfb-015a.prt.2	88.93K
94	bfb-017a.prt.1	56.21K
95	bfb-018a.prt.1	418.38K
96	bfb-018a.prt.2	401.95K
97	bfb-019a.prt.1	169.79K
98	bfb-020a.prt.1	211.88K
99	bfb-020a.prt.2	202.28K
100	bfb-021a.prt.1	214.21K
101	bfb-022a.prt.1	157.22K
102	bfb-023a.prt.1	213.17K
103	bfb-023a.prt.2	205.45K
104	bfb-024a.prt.1	265.74K
105	bfb-024a.prt.2	257.03K
106	bfb-025a.prt.1	66.44K
107	bfb-026a.prt.1	97.32K
108	bfb-027a.prt.1	57.36K
109	bfb-028a.prt.1	65.09K
110	bfb-029a.prt.1	145.40K
111	bfb-030a.prt.1	155.38K
112	bfb-030a.prt.2	151.33K
113	bfb-031a.prt.1	160.95K
114	bfb-032a.prt.1	120.40K
115	bfb-032a.prt.2	107.18K
116	bfb-033a.prt.1	99.49K
117	bfb-034a.prt.1	72.98K
118	bfb-034a.prt.2	70.13K
119	bfb-035a.prt.1	112.16K
120	bfb-036a.prt.1	82.04K
121	bfb-036a.prt.2	79.32K
122	bfb-037a.prt.1	69.03K
123	bfb-038a.prt.1	91.74K
124	bfb-039a.prt.1	241.80K
125	bfb-039a.prt.2	232.11K
126	bfb-040a.prt.1	142.42K
127	bfb-040a.prt.2	137.52K
128	bfb-041a.prt.1	70.99K
129	bfb-042a.prt.1	92.73K
130	bfb-043a.prt.1	94.34K
131	bfb-044a.prt.1	223.34K
132	bfb-044a.prt.2	205.06K
133	bfb-045a.prt.1	101.99K
134	bfb-045a.prt.2	99.08K
135	bfb-046a.prt.1	66.33K
136	bfb-047a.prt.1	245.47K
137	bfb-047a.prt.2	236.51K
138	bfb-048a.prt.1	148.03K
139	bfb-048a.prt.2	143.41K
140	bfb-049a.prt.1	169.07K
141	bfb-050a.prt.1	82.60K
142	bfb-050a.prt.2	80.69K
143	bfb-055a.prt.1	142.29K
144	bfb-055a.prt.2	137.83K
145	bfb-bj01.prt.1	126.17K
146	bfb-bj01.prt.2	122.37K
147	bfb-bj02.prt.1	130.30K
148	bfb-bj02.prt.2	124.49K
149	bfb-bj03.prt.1	90.17K
150	bfb-bj03.prt.2	87.23K
151	bfb-bj04.prt.1	73.70K
152	bfb-bj04.prt.2	71.92K
153	bfb-bj05.prt.1	85.09K
154	bfb-bj05.prt.2	82.39K
155	bfb-bj06.prt.1	192.23K
156	bfb-bj06.prt.2	184.68K
157	bfb-bj07.prt.1	106.94K
158	bfb-bj08.prt.1	153.74K
159	bfb-bj09.prt.1	79.79K
160	bfb-bj10.prt.1	144.94K
161	bfb-bj11.prt.1	74.15K
162	bfb-bj11.prt.2	71.64K
163	bfb-bj12.prt.1	65.21K
164	bfb-bj12.prt.2	63.51K
165	bfb-bj13.prt.1	175.64K
166	bfb-bj13.prt.2	168.11K
167	bfb-bj14.prt.1	138.92K
168	bfb-bj14.prt.2	135.36K
169	bfb-bj15.prt.1	118.17K
170	bfb-bj15.prt.2	114.14K
171	bfb-bj16.prt.1	92.27K
172	bfb-bj16.prt.2	88.60K
173	bfb-bj17.prt.1	50.61K
174	bfb-bj18.prt.1	91.54K
175	bfb-bj19.prt.1	85.32K
176	bfb-bj20.prt.1	62.31K
177	bfb-bj20.prt.2	60.58K
178	bfb-bj22.prt.1	51.69K
179	bfb-tkl-1.prt.1	78.78K
180	bfb-tkl-2.prt.1	77.75K
181	box-scb2-5.prt.1	91.16K
182	c-ppsn4.prt.1	85.52K
183	cdqskb12-30d-m9nl.asm.1	41.22K
184	cdqskb12-30d-m9nl_0_0_0_.asm.1	41.92K
185	cf4uura.prt.1	127.50K
186	cf_6_uu_r-a.prt.1	171.04K
187	cqsb12-5d.asm.1	40.79K
188	ee-sx671a.prt.1	98.95K
189	ee-sx674.prt.1	180.42K
190	eg20_rail_1_3.prt.1	254.45K
191	egh20ca-640.asm.1	36.97K
192	egh20ca_asm_asm_1_asm_4.asm.1	43.18K
193	egh20ca_block_2_9.prt.1	283.33K
194	htpa32s3m100-a-p6.asm.1	40.52K
195	m3x0_5x5l.xpr	489.33K
196	m3x0_5x6l.xpr	553.24K
197	m4x0_7x10l.xpr	626.16K
198	m4x0_7x8l.xpr	545.22K
199	m5x0_8x35l.xpr	934.86K
200	manifold_solid_brep_95.prt.1	630.52K
201	manifold_solid_brep_96.prt.1	130.62K
202	mgw15h.asm.1	36.94K
203	mgw15h_asm.asm.1	34.83K
204	p3m-10-1191.prt.1	63.22K
205	p3m-10-1443.prt.1	63.14K
206	pack-sfb3-6.prt.1	70.71K
207	pack-sfb4-10.prt.1	71.33K
208	prt0003.prt.1	73.80K
209	prt0004.prt.1	73.89K
210	ptbn255p3m-100_info-1-14-14.prt.1	104.29K
211	ptpa22p3m100-b-p6_35.asm.1	36.82K
212	ptpa22p3m100-b-p8.asm.1	37.90K
213	sand94f7h95l_asm.asm.1	46.80K
214	sand94f7h95l_asm.asm.2	45.40K
215	shcs_cb.prt.1	510.28K
216	spsnl6-m5-_.prt.1	343.72K
217	stwn5.prt.1	103.24K
218	stwn6.prt.1	106.24K
219	tbi-1404-610.prt.1	76.35K
220	_cdqskb12-30d-m9n_0__body.prt.1	248.92K
221	_cdqskb12-30d-m9n_0__rod.prt.1	88.14K
222	_cqsb12-5d_0_0__body.prt.1	250.57K
223	_cqsb12-5d_0_0__rod.prt.1	79.43K
224	_cqs_d-m9n.prt.1	77.11K
225	_htpa18s3m100-k-p4_a.prt.1	355.64K
226	_htpa32s3m100-a-p6_a.prt.1	515.96K
227	_ptpa22p3m100-b-p6_35_a.prt.1	277.05K
228	_ptpa22p3m100-b-p8_a.prt.1	281.16K
229	_set-screw3-3.prt.1	73.99K
230	_set-screw4-3.prt.1	73.45K
231	图片1.png	139.69K
232	晶圆提篮升降机构晶圆.idx	20.81K