精圆老化测试上料机构附

（ID:3662115）

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机械设备 / 实验测试设备 / 精圆老化测试上料机构附

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#	文件名称	文件大小
1	42步进装配体.SLDASM	178.92K
2	6‘WaferCassette.SLDPRT	308.05K
3	6寸花篮带晶圆.SLDASM	242.51K
4	8寸Cassette带Wafer.SLDPRT	792.01K
5	AS1201F-M5E-04A.SLDPRT	115.53K
6	BAC606.SLDPRT	167.06K
7	BAC626.SLDPRT	160.69K
8	BMF06-A10.SLDPRT	107.40K
9	BOX-TAC01-M4-L20.SLDPRT	70.01K
10	BOX-TAC01-M4-L20.stp	38.64K
11	BSA15.SLDPRT	321.88K
12	BTN15.SLDPRT	112.52K
13	C-BOX-MSSF5-6.SLDPRT	73.05K
14	C-BSS2005-500-KC12-BSA15-BTN15.SLDASM	325.55K
15	C-BSS2005-500-KC12.SLDASM	319.24K
16	CJ2B10-30Z0_1_0.SLDASM	493.50K
17	CQ2B12-10S_0_0_0_.SLDPRT	123.54K
18	D2852.SLDPRT	836.78K
19	DBJ53-D34-d8-e12.SLDPRT	258.00K
20	EBF22-S3M100-19-A-P-d5.SLDPRT	305.19K
21	ECY51-S3M-100.SLDPRT	191.95K
22	EE_SX954_W.SLDPRT	97.95K
23	EGH15CA.SLDASM	607.92K
24	ENG01-D20-T11.SLDPRT	78.05K
25	EVD21-20-S3M100.SLDPRT	319.16K
26	EX-11EAD.SLDPRT	36.14K
27	EX-11EAP.SLDPRT	28.56K
28	EX-13EA-1.SLDASM	30.04K
29	F2H3-D__0H3D_.SLDPRT	63.07K
30	hg-t1010_STEP.SLDASM	538.27K
31	HRQ100__.SLDASM	739.87K
32	HRQ100__.stp	699.64K
33	IDA61-200.SLDASM	370.36K
34	JA10-4-070_0_.SLDPRT	88.35K
35	KSL04-M5.SLDPRT	121.73K
36	LCR-8-30---S6__0_.SLDASM	798.08K
37	Loadingassembly.SLDASM	3.08M
38	M-5H-4.SLDPRT	90.13K
39	M4螺母.SLDPRT	84.34K
40	MGN12C.SLDASM	579.54K
41	MGW9H.SLDASM	358.63K
42	MISUMI_C-AWS5-20.SLDPRT	168.52K
43	MISUMI_NPB6_O型圈.SLDPRT	154.49K
44	MISUMI_SAIPO3-15.SLDPRT	118.35K
45	moniw.SLDPRT	42.88K
46	MXS8-30A-M9N_0_0_.SLDPRT	403.41K
47	pm-k45.SLDPRT	121.97K
48	pm-l25_step0510.SLDPRT	77.75K
49	RDSB08-100-23021-A10510.SLDPRT	114.79K
50	RDSB08-100-23022-A10510.SLDPRT	127.18K
51	RDSD-xxxx-051001-A1.SLDPRT	512.53K
52	RDSD-xxxx-051002-A1.SLDPRT	102.06K
53	RDSD-xxxx-051003-A1.SLDPRT	134.87K
54	RDSD-xxxx-051004-A1.SLDPRT	139.94K
55	RDSD-xxxx-051005-A1.SLDPRT	86.25K
56	RDSD-xxxx-051006-A1.SLDPRT	190.08K
57	RDSD-xxxx-051007-A1.SLDPRT	88.93K
58	RDSD-xxxx-051008-A1.SLDPRT	90.50K
59	RDSD-xxxx-051009-A1.SLDPRT	63.38K
60	RDSD-xxxx-051010-A1.SLDPRT	122.33K
61	RDSD-xxxx-051011-A1.SLDPRT	115.53K
62	RDSD-xxxx-051012-A1.SLDPRT	93.33K
63	RDSD-xxxx-051013-A1.SLDPRT	77.29K
64	RDSD-xxxx-051014-A1.SLDPRT	43.99K
65	RDSD-xxxx-051015-A1.SLDPRT	55.89K
66	RDSD-xxxx-051016-A1.SLDPRT	97.57K
67	RDSD-xxxx-051017-A1.SLDPRT	99.20K
68	RDSD-xxxx-051018-A1.SLDPRT	66.82K
69	RDSD-xxxx-051019-A1.SLDPRT	106.78K
70	RDSD-xxxx-051020-A1.SLDPRT	143.96K
71	RDSD-xxxx-051021-A1.SLDPRT	70.13K
72	RDSD-xxxx-051022-A1.SLDPRT	86.24K
73	RDSD-xxxx-051023-A1.SLDPRT	94.90K
74	RDSD-xxxx-051024-A1.SLDPRT	109.80K
75	RDSD-xxxx-051025-A1.SLDPRT	76.48K
76	RDSD-xxxx-051026-A1.SLDPRT	116.81K
77	RDSD-xxxx-051027-A1.SLDPRT	121.43K
78	RDSD-xxxx-051028-A1.SLDPRT	195.29K
79	RDSD-xxxx-051029-A1.SLDPRT	136.73K
80	RDSD-xxxx-051030-A1.SLDPRT	112.34K
81	RDSD-xxxx-051031-A1.SLDPRT	120.04K
82	RDSD-xxxx-051032-A1.SLDPRT	104.17K
83	RDSD-xxxx-051033-A1.SLDPRT	161.34K
84	RDSD-xxxx-051034-A1.SLDPRT	113.63K
85	RDSD-xxxx-051035-A1.SLDPRT	134.68K
86	RDSD-xxxx-051036-A1.SLDPRT	79.24K
87	RDSD-xxxx-051037-A1.SLDPRT	78.06K
88	RDSD-xxxx-051038-A1.SLDPRT	144.09K
89	RDSD-xxxx-0510383-A1.SLDPRT	87.87K
90	RDSD-XXXX-051101-A1.SLDPRT	145.13K
91	RDSD-XXXX-051102-A1.SLDPRT	75.46K
92	RDSD-XXXX-051103-A1.SLDPRT	193.71K
93	RDSD-XXXX-051104-A1.SLDPRT	191.65K
94	RDSD-XXXX-051105-A1.SLDPRT	186.58K
95	RDSD-XXXX-051106-A1.SLDPRT	119.74K
96	RDSD-XXXX-051107-A1.SLDPRT	100.64K
97	RDSD-XXXX-051108-A1.SLDPRT	64.27K
98	RDSD-XXXX-051109-A1.SLDPRT	125.35K
99	RDSD-XXXX-051110-A1.SLDPRT	60.72K
100	RDSD-XXXX-051111-A1.SLDPRT	94.75K
101	RDSD-XXXX-051112-A1.SLDPRT	141.03K
102	RDSD-XXXX-051113-A1.SLDPRT	124.39K
103	RDSD-XXXX-051114-A1.SLDPRT	126.86K
104	RDSD-XXXX-051115-A1.SLDPRT	125.05K
105	RDSD-XXXX-051120-A1.SLDPRT	312.82K
106	RDSD-XXXX-051121-A1.SLDPRT	313.37K
107	RDSD-XXXX-051122-A1.SLDPRT	81.10K
108	RDSD-XXXX-051123-A1.SLDPRT	68.60K
109	RDSD-XXXX-051124-A1.SLDPRT	113.35K
110	RDSD-XXXX-051126-A1.SLDPRT	67.69K
111	RDSD-XXXX-051127-A1.SLDPRT	67.96K
112	RDSD-XXXX-051128-A1.SLDPRT	87.12K
113	RDSD-XXXX-051129-A1.SLDPRT	109.18K
114	RDSD-XXXX-051130-A1.SLDPRT	129.69K
115	RDSD-XXXX-051132-A1.SLDPRT	123.90K
116	RDSD-XXXX-051133-A1.SLDPRT	128.28K
117	RDSD-XXXX-051135-A1.SLDPRT	105.46K
118	RDSD-XXXX-051136-A1.SLDPRT	107.98K
119	RDSD-XXXX-051137-A1.SLDPRT	87.84K
120	RDSD-XXXX-051138-A1.SLDPRT	139.96K
121	RDSD-XXXX-051139-A1.SLDPRT	77.28K
122	RDSD-XXXX-051140-A1.SLDPRT	66.32K
123	RDSD-XXXX-051141-A1.SLDPRT	217.36K
124	RDSD-XXXX-051142-A1.SLDPRT	81.34K
125	sensor安装板2.SLDPRT	78.44K
126	VAC31-F40-R28-N25-VDC32.SLDPRT	1.33M
127	VNF02-1.0-28-B10-A-P17.SLDPRT	269.33K
128	VNU02-1-ZD-L120-A5-B8-C8.SLDPRT	234.86K
129	wafer6po.SLDPRT	23.91K
130	wafer8inch.SLDPRT	45.57K
131	Y07-59D1-3039.SLDPRT	192.79K
132	丝杆模组.SLDASM	1.31M
133	信浓-STP-42D2154-02.SLDPRT	104.36K
134	到位检测0510.SLDASM	92.80K
135	取放wafer真空组件.SLDASM	1.03M
136	对射传感器ass.SLDASM	387.40K
137	底座支撑.SLDASM	127.65K
138	总装图纸.SLDASM	5.31M
139	总装图纸.step	32.66M
140	抽屉组件.SLDASM	800.88K
141	料盒.SLDPRT	266.98K
142	旋转装置0515.SLDASM	938.60K
143	旋转部分.SLDASM	2.29M
144	旋转部分组件.SLDASM	1.76M
145	滚轮装配体.SLDASM	228.23K
146	皮带.SLDPRT	66.14K
147	皮带2.SLDPRT	62.56K
148	角度旋转.SLDASM	1.93M
149	镜向RDSD-xxxx-051013-A1.SLDPRT	47.68K
150	镜向RDSD-xxxx-051027-A1.SLDPRT	64.04K
151	顶平模块.SLDASM	134.36K
152	顶部夹紧机构.SLDASM	1.31M
153	齿轮齿条机构.SLDASM	342.84K